Failed to create kernel event for collection set

Hi all,

SQL Server 2012 Enterprise Edition 

Microsoft SQL Server 2012 - 11.0.5569.0 (X64) 
Jan  9 2015 11:38:17 
Copyright (c) Microsoft Corporation
Enterprise Edition (64-bit) on Windows NT 6.2 <X64> (Build 9200: ) (Hypervisor)

I've enabled Data Collection, but I receive an error for the collection of Query Statistics, the message I see into the log is:

Message
Failed to create kernel event for collection set: {2DC02BD6-E230-4C05-8516-4E8C0EF21F95}. Inner Error ------------------>
Cannot create a file when that file already exists.

The other collection are just fine.